基本内容

随着电子工业的飞速发展，静电在电子产品的生产和使用中的危害日趋严重，造成不可估量的经济损失。以美国为例，电子工业部门每年因静电造成的损失高达100亿美元。在电子工业中，静电危害主要表现为静电放电。静电放电会使电子元器件失效或存在隐患，甚至使电子产品完全损坏。 本论文从静电放电的机理入手，论述了在芯片生产过程中静电放电产生的原因以及对电子产品的危害，并重点讨论了芯片制造车间静电测试的理论与实践。在此基础上，以在上海贝岭股份公司的实际测试工作为依据，介绍了在老化车间、测试车间、半成品仓储车间及成品仓储车间等防静电工作区中各种器材进行的测试数据，并对测试结果进行了简要的评估，提出了一些技术性建议。 论文中还介绍了电子工业中静电放电的三种主要试验模型：人体模型、机器模型和带电器件模型以及静电放电敏感器件的分类标准，还提出了静电放电防护区的设计思想和离子风机的发展趋势，从而为进一步探索与完善IC制造工艺中ESD综合防治对策奠定技术基础。With the high development of electric industry, the harm caused by the static becomes more and more serious in the processes of producing and using electric products, and it brings inestimable economic loss. In America for example, the loss caused by static reaches 10 billion dollars every year in electric industry. It is just the electrostatic discharge (ESD) result in the harm. ESD can make the electronic units incapable or lead to hidden trouble, and even damage electronic products completely.Starting from the principle of ESD, this paper discusses how the ESD comes into being and its harm to electronic products in the process of chip producing, and especially discusses the theory and practice of electrostatic test in the chips manufacturing workshop. Based on this, the author did some test-work in Shanghai Belling Co. Ltd., mainly about every type of equipments in the electrostatic discharge protected area in some workshops (including artificial aging workshop, testing workshop, semi-finished articles storage workshop and finished articles storage workshop, etc). This paper estimates all the test data and puts forward some technical advices.This paper also introduces three kinds of ESD model in the electric industry: human body model (HBM), machine model (MM) and charged device model (CDM) and classification standard of ESD sensitive device. It also puts forward the idea of designing the ESD protecting area and the developing tread of ionizer. So we could settle the technical base for the synthetically ESD countermeasure of IC manufacturing in more searching and consummating steps.Zhao Junping (Power electronics and electrical drive)Directed by Sun Keping